EUV Ptychography dataset acquired with a sCMOS detector

Given are .hdf5 file containing EUV ptychography datasets acquired using a high-order harmonic source. The dataset was acquired with a state-of-the-art HHG source operating at 13.5 nm wavelength [1]. For the given data an sCMOS detector (Andor Marana) was used. More details on the measurement can be found in a recent publication [2]. The ptychography datasets can be directly reconstructed with PtyLab [3]. Experimental parameters Wavelength: 13.5 nm Detector - Sample distance 28 mm Detector pixel size: 11 um Probe: OAM-Beam with charge 1 Number of pixels: Depending on the dataset. For the high-resolution measurement the whole chip was used (i.e. 2048 x 2048 pxls) for Positions: The ptychography positions are saved in the hdf5 file (key: encoder) Please contact Wilhelm Eschen ([e-mail]) or Jan Rothhardt ([e-mail]) for more details. [1] https://doi.org/10.1364/OE.28.006188 [2] https://doi.org/10.1364/OE.485779 [3] https://doi.org/10.1364/OE.485370本数据集存储于.hdf5格式文件中，包含采用高次谐波（HHG）光源采集的极紫外（EUV）叠层成像（ptychography）数据集。该数据集由工作波长为13.5 nm的顶尖高次谐波光源采集得到[1]，采集过程使用了sCMOS探测器（Andor Marana）。相关测量的更多细节可参阅近期发表的研究成果[2]。该叠层成像数据集可直接通过PtyLab工具进行重建[3]。 实验参数 波长：13.5 nm 探测器-样品间距：28 mm 探测器像素尺寸：11 μm 探针：带有1阶轨道角动量（OAM）的光束 像素总数：因数据集而异。针对高分辨率测量场景，使用了完整的探测器芯片（即2048×2048像素） 扫描位置：叠层成像的扫描位置存储于该hdf5文件中，对应的键名为encoder 如需获取更多细节，请联系Wilhelm Eschen（[e-mail]）或Jan Rothhardt（[e-mail]）。 [1] https://doi.org/10.1364/OE.28.006188 [2] https://doi.org/10.1364/OE.485779 [3] https://doi.org/10.1364/OE.485370