Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride
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Data used for figures in "Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride" Anastasiia Ciers et.al
《氮化铝（aluminium nitride）制备的压电高Q_m纳米机械谐振器力学性能的厚度依赖性》一文中各图表所用的数据集，作者为Anastasiia Ciers 等人
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Zenodo创建时间：
2024-10-04
