拼接光栅位移测量系统及测量方法

一种轴承内外径的测量装置，其特征在于，包括：精密二维运动模块、轴承装夹模块和位移精度补偿模块，所述精密二维运动模块包括支撑结构和二维位移结构；所述支撑结构包括隔振底座、铝型材和大理石平台；所述隔振底座放置在地面上，所述大理石平台放置在所述隔振底座上，所述铝型材放置在所述大理石平台上；所述二维位移结构固定在所述支撑结构上，用于实现沿X轴和Y轴两个方向上的位移运动，所述轴承装夹模块和待测轴承放置在所述二维位移结构上，所述轴承装夹模块用于对所述待测轴承进行固定；所述位移精度补偿模块用于对所述二维位移结构的位移精度进行补偿，所述位移精度补偿模块包括：探测器装置、激光干涉仪装置、测量镜装置、分光镜和分束器；所述探测器装置安装在所述铝型材上，固定在所述二维位移结构的上方；所述探测器装置用于获取探针与待测轴承接触时的位置信息；所述测量镜装置安装在所述二维位移结构上，位于所述轴承装夹模块的底部；所述激光干涉仪装置发出一束激光光束，依次经过所述分束器和所述分光镜后被分为一束测量光束和一束参考光束，所述测量光束沿Y轴方向垂直入射至所述测量镜装置，经所述测量镜装置反射后原路返回，与所述参考光束进行对比后得到所述二维位移结构沿Y轴方向的位移，并对所述二维位移结构Y轴方向的位移精度进行补偿；在对待测轴承内外径的测量过程中：通过移动所述二维位移结构，使所述探测器装置位于所述待测轴承的目测直径测量点，通过不断对所述二维位移结构进行微调，读取所述二维位移结构最大Y轴坐标下的X轴坐标，将所述X轴坐标对应的直线作为所述待测轴承的测量路径；沿Y轴方向移动所述二维位移结构，分别获取经所述激光干涉仪装置补偿后的所述待测轴承直径上的外径点L1，第一内径点L2，第二内径点L3的坐标信息，并将所述探测器装置获取的坐标信息作为误差进行补偿，最终得到所述待测轴承的内径和外径。

A measuring device for inner and outer diameters of bearings, characterized by comprising: a precision 2D motion module, a bearing clamping module and a displacement accuracy compensation module. The precision 2D motion module includes a support structure and a 2D displacement structure. The support structure includes a vibration-isolation base, an aluminum profile and a marble platform. The vibration-isolation base is placed on the ground, the marble platform is placed on the vibration-isolation base, and the aluminum profile is placed on the marble platform. The 2D displacement structure is fixed on the support structure and used to realize displacement movement along the X-axis and Y-axis directions. The bearing clamping module and the bearing under test are placed on the 2D displacement structure, and the bearing clamping module is used to fix the bearing under test. The displacement accuracy compensation module is used to compensate the displacement accuracy of the 2D displacement structure, and includes: a detector device, a laser interferometer device, a measuring mirror assembly, a spectroscope and a beam splitter. The detector device is mounted on the aluminum profile and fixed above the 2D displacement structure. The detector device is used to acquire position information when its probe contacts the bearing under test. The measuring mirror assembly is installed on the 2D displacement structure and located at the bottom of the bearing clamping module. The laser interferometer device emits a laser beam, which is split into a measurement beam and a reference beam after passing through the beam splitter and the spectroscope in sequence. The measurement beam is vertically incident on the measuring mirror assembly along the Y-axis direction, reflects back along the original path after being reflected by the measuring mirror assembly, and is compared with the reference beam to obtain the displacement of the 2D displacement structure along the Y-axis, thereby compensating the displacement accuracy of the 2D displacement structure in the Y-axis direction. During the measurement of the inner and outer diameters of the bearing under test: move the 2D displacement structure to position the detector device at the visually estimated diameter measurement point of the bearing under test, continuously fine-tune the 2D displacement structure, read the X-axis coordinate corresponding to the maximum Y-axis coordinate of the 2D displacement structure, and take the straight line corresponding to the X-axis coordinate as the measurement path of the bearing under test. Move the 2D displacement structure along the Y-axis direction, respectively acquire the coordinate information of the outer diameter point L1, the first inner diameter point L2 and the second inner diameter point L3 on the diameter of the bearing under test after compensation by the laser interferometer device, use the coordinate information acquired by the detector device for error compensation, and finally obtain the inner and outer diameters of the bearing under test.