Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 200 Celsius degrees

Application of a microsphere-based fiber-optic sensor with 100 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD coated microsphere-based sensors can be successfully used for temperature measurements.本文报道了一款采用原子层沉积（Atomic Layer Deposition，ALD）法制备100纳米氧化锌（ZnO）涂层的微球型光纤传感器在100℃至300℃温度区间内的温度测量应用。将光纤微球与传感设备集成的核心优势在于，可实时监测传感探头的完整性，进而提升测量过程中的精度。本研究证实，涂覆有原子层沉积氧化锌涂层的微球型光纤传感器可成功应用于温度测量。