MOESM2 of Realization of large-scale sub-10Â nm nanogratings using a repetitive wet-chemical oxidation and etching technique
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Additional file 2. Pattern size distribution of nanogratings measured from SEM images; the datasets state statistical values of graphs in Fig. 5 and Fig. 6b.
补充材料2:通过扫描电子显微镜(SEM)图像测得的纳米光栅图案尺寸分布;本数据集包含图5与图6b中相关图表的统计数值。
创建时间:
2017-03-25



