MOESM2 of Realization of large-scale sub-10Â nm nanogratings using a repetitive wet-chemical oxidation and etching technique

Additional file 2. Pattern size distribution of nanogratings measured from SEM images; the datasets state statistical values of graphs in Fig. 5 and Fig. 6b.补充材料2：通过扫描电子显微镜（SEM）图像测得的纳米光栅图案尺寸分布；本数据集包含图5与图6b中相关图表的统计数值。