Dataset: Optical fabrication and characterisation of SU-8 disk photonic waveguide heterostructure cavities - version 2

The difficulty of achieving reliable spectral and spatial overlap is a serious problem when fabricating photonic crystal (PhC) cavities around self-assembled quantum dots. We present a method for using photoresist to optically fabricate heterostructure cavities in a PhC waveguide with a combined photolithography and micro-photoluminescence spectroscopy system. We confirm the creation of cavity modes with high quality factors (mean = 3.8*10^3, maximum = 7.4(2)*10^3). This method offers a promising route towards bright, on-chip single photon sources for quantum information applications.

在自组装量子点周围制备光子晶体（photonic crystal, PhC）微腔时，实现可靠的光谱与空间重叠存在显著挑战。我们提出一种基于光刻胶的光学制备方法，结合光刻技术与显微光致发光光谱系统，在光子晶体波导中制备异质结构微腔。经实验验证，该方法可制备出高品质因数的腔模，其品质因数均值为3.8×10³，最高可达7.4(2)×10³。该方案为面向量子信息应用的高性能片上单光子源研发提供了极具前景的技术路径。