气溶胶传感器模型及仿真、阴极发射性能、工艺、测试数据集

利用3D建模软件对电离式气溶胶传感器进行物理建模和结构参数设计；建立基于非自持放电的电离传感器多场耦合模型，采用等离子体模型和静电场模型、调节激励条件、电极间距、阴极材料、阴极结构、控制电压等参数，仿真获得不同条件和状态下的传感器电场分布、电子密度、粒子路径等图形结果，实验获取引出极、收集电流等数据结果；记录传感器制造过程中的关键微纳制造工艺与参数；采用正交实验法，改变气溶胶粒径、浓度，干扰电场强度、激励电源形式与参数等，记录传感器在不同条件下的响应与输出数据。

Conduct physical modeling and structural parameter design for ionized aerosol sensors using 3D modeling software. Establish a multi-field coupling model for ionized sensors based on non-self-sustained discharge, adopting plasma and electrostatic field models. Adjust parameters including excitation conditions, electrode spacing, cathode material, cathode structure, and control voltage, then obtain graphical results such as sensor electric field distribution, electron density, and particle trajectories under various conditions and states via simulation, and acquire experimental data including extraction electrode and collected current through experiments. Record key micro-nano manufacturing processes and parameters during the sensor manufacturing process. Adopt the orthogonal experimental method, alter parameters such as aerosol particle size, concentration, interfering electric field strength, excitation power supply form and parameters, and record the response and output data of the sensor under different conditions.