Data for A FinFET with one atomic layer channel

This dataset contains raw optical/SEM images of the nano fabrication, and electrical transport test, etc, which are related to the manuscript of A FinFET with One Atomic Layer Channel.本数据集包含与《单原子层沟道鳍式场效应晶体管（Fin Field-Effect Transistor，FinFET）》手稿相关的纳米加工原始光学图像、扫描电子显微镜（Scanning Electron Microscope，SEM）图像，以及输运电学测试原始资料等内容。