片上可编程器件参数集合数据

该数据集包含三个数据内容，分别为可编程级数、材料形貌测试、材料损耗测试三个方面的测试结果。这些数据均来源于实验的实际测试结果，所采用的记录软件、实验设备（如激光器、功率计、显微镜等）均为商业化产品。在可编程级数文件中，汇交了采用激光直写系统实现的原位多级输出台阶效果，包括原始绘图数据与台阶图片，以及激光加工界面的截图；在材料形貌测试文件中存放了金相显微镜测量材料横向尺寸的结果、采用椭圆偏振仪测试的薄膜厚度的结果；在损耗测试文件夹中存放了三个mp4视频文件，完整记录了如何测试损耗大小、以及损耗具体多大的实验测试过程，可以通过视频看到损耗满足任务书要求。该文件夹的大小为64.4MB。

This dataset includes three sets of test results, corresponding to programmable step series, material morphology testing, and material loss testing, respectively. All data in this dataset are sourced from actual experimental test outcomes, and the recording software and experimental equipment (including lasers, power meters, microscopes, etc.) used in the experiments are all commercial off-the-shelf products. In the programmable step series file, the in-situ multi-level output step effects realized by the laser direct writing system are compiled, covering original drawing data, step images, and screenshots of the laser processing interface. The material morphology testing file stores the results of material lateral dimensions measured via a metallurgical microscope, and the thin film thickness results obtained through ellipsometer testing. The loss testing folder contains three MP4 video files, which comprehensively record the entire experimental testing process of how to measure the loss magnitude and the specific loss value. It is evident from the videos that the loss meets the requirements stipulated in the project task document. The total size of this dataset folder is 64.4 MB.