硅-铌酸锂薄膜基片的面积第三方测试原始数据

本数据集为四寸的绝缘体上铌酸锂薄膜晶圆上铌酸锂薄膜的面积的第三方测试数据，这些数据由上海市质量监督检验技术研究院通过影像测量仪和三坐标测量机测量提供。铌酸锂是一种新型的集成光子学材料，大面积的绝缘体上铌酸锂薄膜提供了一个实现高速电光调制系统的平台。而本数据集中的四寸绝缘体上铌酸锂薄膜晶圆则为晶圆级的铌酸锂光子学结构的制备，提供了一个高效的平台。

This dataset comprises third-party test data measuring the area of lithium niobate thin films on 4-inch lithium niobate thin film-on-insulator (LNOI) wafers. The data was measured and provided by the Shanghai Institute of Quality Inspection and Technical Research using an image measuring instrument and a coordinate measuring machine. Lithium niobate is a novel integrated photonic material, and large-area LNOI wafers offer a platform for realizing high-speed electro-optic modulation systems. Furthermore, the 4-inch LNOI wafers included in this dataset provide an efficient platform for the fabrication of wafer-scale lithium niobate photonic structures.