与光探测器单片集成的InP微透镜的仿真制备数据

基于光电集成的发展方向，通过调研文献，合理建立仿真模型，进行实验制备，仿真数据通过COMSOL软件仿真得到，使用ICP进行实验制备。Based on the development direction of optoelectronic integration, a reasonable simulation model was established through literature review, and experimental preparation was conducted. The simulation data was obtained via COMSOL software simulation, while inductively coupled plasma (ICP) was employed for the experimental preparation.

搜集汇总

背景与挑战

背景概述

该数据集提供了与光探测器单片集成的InP微透镜的仿真与制备数据，通过COMSOL软件仿真建模，并采用ICP工艺进行实验制备。数据由河北华美光电子有限公司的刘超等人创建，包含3个文件（xlsx、in、docx格式），数据量约37.24KB。