阵列波导光栅器件仿真及测试数据

本数据集面向课题高性能硅基光电探测器芯片的研制，基于DEMUX与探测器单片集成工艺的设计与优化，包含了阵列波导光栅仿真结构及光场仿真结果、阵列波导光栅结构及实物图、阵列波导光栅器件传输光谱测试图。数据集内包含11个数据文件，为阵列波导光栅仿真结构及光场仿真结果、阵列波导光栅结构及实物图、阵列波导光栅器件传输光谱测试图。数据集容量103MB。This dataset is tailored for the research project focused on developing high-performance silicon-based photodetector chips, which centers on the design and optimization of the monolithic integration process between DEMUX and photodetectors. It covers three categories of data: the simulated structures and optical field simulation results of arrayed waveguide gratings (AWGs), the physical structures and real photographs of AWGs, as well as the transmission spectrum test images of AWG devices. The dataset contains 11 data files in total, all falling into the above categories, with an overall size of 103 MB.

搜集汇总

背景与挑战

背景概述

该数据集聚焦于高性能硅基光电探测器芯片的阵列波导光栅器件，包含仿真结构、光场仿真结果、实物图和传输光谱测试数据，共11个文件、103MB容量。数据集支持DEMUX与探测器单片集成工艺的设计与优化，来源于中国科学院半导体研究所的国家重点研发计划项目，适用于半导体器件与技术领域的研究和应用。