In situ GISAXS study of IZO deposition via magnetron sputtering for optoelectronic devices: film growth and ion bombardment-induced etching dynamics

Name: In situ GISAXS study of IZO deposition via magnetron sputtering for optoelectronic devices: film growth and ion bombardment-induced etching dynamics
Creator: Universitätsbibliothek der Technischen Universität München
Published: 2025-11-03T00:00:00+08:00

data.europa2026-09-09 更新2026-09-11 收录

数据链接：

https://data.europa.eu/data/datasets/https-open-bydata-de-api-hub-repo-datasets-https-mediatum-ub-tum-de-1796158?locale=en 数据链接链接失效反馈

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资源简介：

The dataset could be divided into the raw data (XRR data, SEM data, 2D GISAXS detector data, resistance measurement, absorption spectra measurement, XRD data), analysed data (XRR fitting results, GISAXS modelling results) and final images (sketches and all involved plots).

提供机构：

Universitätsbibliothek der Technischen Universität München

创建时间：

2025-11-03