Data Set of Impedance Spectroscopy Data and Physical Consistency of Humid Nanostructured Silica MIM Capacitors

Raw data and processed data: Impedance spectroscopy data of Humid Nanostructured Silica MIM Capacitors at relative humidity along with the Kramers-Kronig Analysis. This dataset consists of the following files: capacitor1_characteristics.xls.- Dielectric characteristics (e' and tan) of capacitor 1 (3.24 mm2) at room humidity. Capacitor 1 KKtest.xlsx.- Kramers-Kronig Analysis of capacitor 1 Capacitor 2 kk.xlsx.- Dielectric characteristics (e' and tan) of capacitor 2 at controlled humidity and Kramers-Kronig Analysis.