Data-driven plasma modelling: Fluorocarbon ICP data set

This is an open source dataset of optical emission spectra and optical images in fluorocarbon plasmas, along with associated tool logs, captured from a Oxford Intruments Plasma Technology PP100 ICP etcher. The dataset consists of Ar, O2, Ar/O2, CF4/O2 and SF6/O2 gas mixtures etching Si wafers. The data has been split into chunks for uploading to Zenodo, to reconstruct them: $ cat generative_model-fluorocarbon_data_set.tar.xz* > generative_model-fluorocarbon_data_set.tar.xz $ tar -xvf generative_model-fluorocarbon_data_set.tar.xz You can find the code to train an autoencoder model using the optical emission spectra and optical images at our github repo, https://github.com/gregdaly/generative_modelling_for_optical_plasma_diagnostics