Data set for "Automated Wafer-Level Characterisation of Electrochemical Test Structures for Wafer Scanning"

This paper presents an automated system for the electrochemical characterization of micro-scale test structures at the wafer level, with the objective to identify good devices suitable for full characterization and packaging. The integration of the on-wafer characterization enables a quality assessment of the devices prior to packaging ensuring the development of this technology minimizes the packaging of faulty sensors. The prototype system integrates all the elements for automated on-wafer in-line characterization of electrochemistry based systems thereby confirming the suitability of this approach for implementation on commercial automated probers, which are generally available for parametric testing. The system's capabilities are demonstrated on a three-electrode cell design typically employed in electrochemical sensing applications. Finally, the system is integrated with a semi-automatic probe station and its potential demonstrated by wafer mapping the performance of electrochemical microelectrode devices.