2D transfer stage inside glovebox cluster (GBox-TRS)

<p>The 2DCC Inert Atmosphere Cluster Tool enables the fabrication and characterization of air-sensitive van der Waals heterostructures and devices. It consists of three major pieces of instrumentation housed in two conjoined, argon gas-filled gloveboxes. The tool features a state-of-the-art transfer stage from HQ Graphene, an atomic force microscope from Asylum Research (MFP-3D Origin+) and a customized two-glovebox system from M. Braun, Inc, with integrated physical vapor deposition capabilities from Island e-Beam.</p><h6>Capabilities of 2D transfer stage (GBox-TRS)</h6><p>Precise transfer stacking of air-sensitive van der Waals heterostructures</p><ul><li><p>Fully motorized, compute-controlled transfer</p></li><li><p>9 Degrees of Freedom: sample stage x/y/z/rotate, mask x/y/rotate/tilt, focus</p></li><li><p>Precise translational motion control &lt; 1&#181;m</p></li><li><p>Rotational motion with 0.01° precision</p></li><li><p>6 Objectives with darkfield mode: 2X, 10X, 20X, 40X, 50X, 100X (3mm working distance)</p></li><li><p>PID-controlled heating and cooling of the sample stage, with a maximum stage temperature of 200°C</p></li></ul><h6>Capabilities of two-box cluster (GBoxClust)</h6><p>Process air-sensitive van der Waals materials and thin films inside the glovebox</p><ul><li><p>Custom stands and mechanical connections to minimize vibration</p></li><li><p>Filled with argon gas with oxygen &lt; 0.1 PPM, water &lt; 0.1 PPM</p></li><li><p>Sample transfer through a vacuum suitcase</p></li><li><p>Exfoliation area</p></li><li><p>Hot plate</p></li></ul>