R43

Sample ID R43 of the Surface Topography Challenge Measurement 1: The surfaces were measured using White Light Interferometry (WLI; MFT-5000, Rtec). The sample was analyzed directly after unpacking without further cleaning procedure. Five positions of the sample (in the middle = P1, top right corner =P2, bottom right corner = P3, bottom left corner = P4, and top left corner = P5) were analyzed with different magnifications (10x, 20x, 50x). The positions P1-5 at the different magnifications are not identical. *.bcrf, *.enc, *.info and *.png files were exported as raw-data of the measurement with the WLI from R-tec. The *.bcrf file was then further processed using Mountain®9, whereby tilt and curvature were removed. Furthermore, the surface roughness parameters (S-values) were evaluated in accordance to ISO 25178 without filter. Finally, the *.mnt files and *.pdf report files were exported Measurement 2: The surfaces were measured using White Light Interferometry (WLI;Profilm3D®, Filmmetrics). The sample was analyzed directly after unpacking without further cleaning procedure. The WLI was calibrated by the Filmetrics step-height standard SHS-16278. One position per sample was analyzed with a magnification of 10x. *.fibcs, *.fibps, *.stl, *.sur and *.txt files were exported as raw-data of the measurement with the WLI from Filmmetrics.