New Volatile Strontium and Barium Imidazolate Complexes for the Deposition of Group 2 Metal Oxides
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We report the synthesis, characterization, and experimental density function theory-derived properties of new volatile strontium and barium imidazolate complexes, which under atomic layer deposition conditions using ozone as a reagent can deposit crystalline strontium oxide at 375 °C.
创建时间：
2016-02-22
