一种超润滑非晶碳基薄膜及其制备方法和应用

本发明涉及润滑材料技术领域，提供了一种超润滑非晶碳基薄膜及其制备方法和应用。本发明提供的超润滑非晶碳基薄膜包括自下而上依次设置的粘结过渡层、碳化物梯度层和复合含氢非晶碳基膜层，所述复合含氢非晶碳基膜层为硫化物掺杂的含氢非晶碳薄膜，所述硫化物为硫化钨和硫化钼中的一种或两种。本发明通过掺杂少量硫化物对碳基薄膜的结构进行调控，所得超润滑非晶碳基薄膜与传统含氢非晶碳基薄膜相比较，表现出更加稳定的超润滑性能和更加优异的抗磨损性能，为摩擦学部件表面防护提供了新的解决方案，具有重要的工业应用价值。

This invention relates to the technical field of lubricating materials, and provides an ultra-lubricating amorphous carbon-based film, as well as its preparation method and application. The ultra-lubricating amorphous carbon-based film provided by this invention comprises, from bottom to top in sequence, a bonding transition layer, a carbide gradient layer, and a composite hydrogen-containing amorphous carbon-based film layer. The composite hydrogen-containing amorphous carbon-based film layer is a hydrogen-containing amorphous carbon film doped with sulfides, wherein the sulfides are one or both of tungsten sulfide and molybdenum sulfide. This invention regulates the structure of carbon-based films by doping a small amount of sulfides. Compared with traditional hydrogen-containing amorphous carbon-based films, the resulting ultra-lubricating amorphous carbon-based film exhibits more stable ultra-lubricating performance and superior anti-wear performance, providing a new solution for surface protection of tribological components, and holds important industrial application value.