SEM/EDX data of (Cr,Fe,Mn,Co,Ni)3O4 High-entropy spinel oxide thin films deposited on amorphous SiO2 substrate by spray pyrolysis techniqe

This Data set include SEM and EDX results of (Mn,Co,Fe,Ni,Cr)3O4 high-entropy spinel oxide prepared in the form of a ~ 500 nm thin film utilising a facile spray pyrolysis technique. The structural and electrical properties of the layers were characterised after exposure to temperatures in the range of 400–900 ◦C. The as-deposited layers were amorphous, and crystallised upon heat treatment at 500 ◦C. Microstructural analyses proved a homogeneous elemental distribution and the desired Fd-3 m cubic spinel structure. Electrical conductivity measurements indicated a dependence on the processing temperature, with the highest electrical conductivity values (~3 S cm􀀀 1 at 700 ◦C) obtained for layers heat-treated at 700 ◦C. The spray pyrolysis technique seems to be well suited to fabricating and exploring spinel-based high-entropy oxides synthesized as thin films, and to studying new compositions containing transition metal cations.