TEM data of (Cr,Fe,Mn,Co,Ni)3O4 High-entropy spinel oxide thin films deposited on amorphous SiO2 substrate by spray pyrolysis techniqe

This Dataset include presentation of summarized TEM investigation of (Mn,Co,Fe,Ni,Cr)3O4 high-entropy spinel oxide prepared in the form of a ~ 500 nm thin film utilising a facile spray pyrolysis technique. The structural and electrical properties of the layers were characterised after exposure to temperatures in the range of 400–900 ◦C. The as-deposited layers were amorphous, and crystallised upon heat treatment at 500 ◦C. Microstructural analyses proved a homogeneous elemental distribution and the desired Fd-3 m cubic spinel structure. Electrical conductivity measurements indicated a dependence on the processing temperature, with the highest electrical conductivity values (~3 S cm􀀀 1 at 700 ◦C) obtained for layers heat-treated at 700 ◦C. The spray pyrolysis technique seems to be well suited to fabricating and exploring spinel-based high-entropy oxides synthesized as thin films, and to studying new compositions containing transition metal cations.本数据集包含对采用简便喷雾热解技术制备的约500 nm厚薄膜状(Mn,Co,Fe,Ni,Cr)3O4高熵尖晶石氧化物（high-entropy spinel oxide）的透射电子显微（Transmission Electron Microscopy, TEM）表征总结内容。该薄膜层在400–900℃温度区间进行退火处理后，对其结构与电学性能开展了表征。原始沉积态薄膜呈非晶结构，经500℃热处理后发生晶化。显微结构分析证实，薄膜具备均匀的元素分布以及符合预期的Fd-3m立方尖晶石结构。电导率测试结果表明其性能与热处理温度密切相关：在700℃退火的薄膜样品电导率最高，可达约3 S·cm⁻¹。喷雾热解技术十分适合用于制备并研究以薄膜形式合成的尖晶石基高熵氧化物，同时也可用于探索含过渡金属阳离子的新型高熵氧化物组分。