Data accompanying the publication: "Aberration characterisation in coherent Fourier scatterometry"

Authors (publication) - Sarika Soman, Silvania F. Pereira<br>The dataset includes the 2D scan data underlying the findings in the publication - "Aberration characterisation in coherent Fourier scatterometry". The dataset shows a 2D CFS scan data of an etched pit in a Si wafer when different amounts of Zernike mode aberration is applied to the input beam using an SLM. The aberrations used in the study are - defocus, astigmatism, oblique astigmatism, horizontal coma, vertical coma, spherical, oblique trefoil, vertical trefoil.