原子力显微探测系统中对高分辨微弱电信号检测应用测量系统及数据集
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音叉式AFM主要面向半导体集成电路，超精密加工制造和纳米材料等领域的表面形貌和微结构扫描成像、物理和化学性能分析等研究的需要建设，基于量子电压作为激励源对音叉式AFM前置放大器幅频信号检测，主要记录了量子电压经过前置放大器后的幅频特性和音叉式AFM信号经过前置放大器后的幅频特性，得到了量子电压标校的后音叉式AFM前置放大器的幅频特性曲线。基于量子电压作为标准信号源对音叉式AFM自激励自感应回路的正弦信号失真度的探测，记录了量子电压合成的多音信号频谱经过AFM自激振荡和自感应反馈控制回路的出输出信号幅频特性、量子电压合成的单音信号频谱经过AFM自激振荡和自感应反馈控制回路的输出信号幅频特性；最后得到自激振荡电路和自感应反馈控制回路的无杂散动态范围（SFDR）为-65 dBc，数据量109.4MB。
This tuning-fork AFM dataset was developed to meet the research requirements of surface topography and microstructure scanning imaging, physical and chemical property analysis in fields such as semiconductor integrated circuits, ultra-precision machining and manufacturing, and nanomaterials. Using quantum voltage as the excitation source for amplitude-frequency signal detection of the tuning-fork AFM preamplifier, this dataset mainly records the amplitude-frequency characteristics of quantum voltage after passing through the preamplifier and the amplitude-frequency characteristics of tuning-fork AFM signals after passing through the preamplifier, and derives the amplitude-frequency characteristic curves of the tuning-fork AFM preamplifier after quantum voltage calibration. Using quantum voltage as the standard signal source to detect the sinusoidal signal distortion of the tuning-fork AFM self-excited self-sensing loop, the dataset records the amplitude-frequency characteristics of the output signals of the frequency spectrum of multi-tone signals synthesized by quantum voltage after passing through the AFM self-oscillation and self-sensing feedback control loop, as well as the amplitude-frequency characteristics of the output signals of the frequency spectrum of single-tone signals synthesized by quantum voltage after passing through the AFM self-oscillation and self-sensing feedback control loop. Finally, the spurious-free dynamic range (SFDR) of the self-oscillation circuit and self-sensing feedback control loop is measured to be -65 dBc, and the total data size of this dataset is 109.4 MB.
