蓝宝石衬底Micro-LED微小尺寸颗粒测量数据集

微小尺寸表面缺陷的量测与控制技术主要针对中微公司开发的Micro-LED用新型MOCVD设备在三安公司开展Micro-LED外延工艺开发与生产调试，研究新款设备在蓝宝石基蓝绿光Micro-LED外延生产过程中表面缺陷的形成原因，进行微小尺寸表面缺陷的相关原因分析与工艺开发，表面缺陷改善工艺的数据追踪和整理，获取了较好的生产良率数据。该数据集主要采集了小电流Micro-LED的芯片测试记录、颗粒改善的统计信息，设备维护周期的统计信息、以及相关测试报告等数据，数据量约为28.4MB。The measurement and control technology for micro-scale surface defects is developed for the new Micro-LED dedicated MOCVD equipment produced by AMEC (China Micro-Equipment Corporation), which was used for Micro-LED epitaxial process development and production debugging at San'an Optoelectronics Co., Ltd. This study investigates the formation causes of surface defects during the production of sapphire-based blue-green Micro-LED epitaxy using the new equipment, conducts cause analysis and process development for micro-scale surface defects, tracks and organizes data from surface defect improvement processes, and has acquired satisfactory production yield data. This dataset mainly collects test records of low-current Micro-LED chips, statistical data of particle defect improvement, statistics of equipment maintenance cycles, relevant test reports and other related data, with a total data volume of approximately 28.4 MB.

搜集汇总

背景与挑战

背景概述

该数据集聚焦于蓝宝石衬底Micro-LED微小尺寸颗粒的测量与控制技术，包含小电流Micro-LED芯片测试记录、颗粒改善统计信息等，数据量28.4MB，格式多样包括pptx、xlsx等。数据集来源于国家重点研发计划项目，旨在优化Micro-LED生产工艺。