Lateral and Vertical Diffusion of Magnesium in Ion-Implanted Halide Vapor Phase Epitaxy Gallium Nitride

Name: Lateral and Vertical Diffusion of Magnesium in Ion-Implanted Halide Vapor Phase Epitaxy Gallium Nitride
Creator: Institute of High Pressure Physics
Published: 2023-12-22T06:47:59+08:00

RepOD Repository for Open Data2023-12-22 更新2026-07-23 收录

氮化镓掺杂扩散

离子注入工艺

数据链接：

https://repod.icm.edu.pl/dataset.xhtml?persistentId=doi:10.18150/JQLIXZ 数据链接链接失效反馈

官方服务：

资源简介：

Sierakowski, Kacper, 2023, "Lateral and Vertical Diffusion of Magnesium in Ion-Implanted Halide Vapor Phase Epitaxy Gallium Nitride", https://doi.org/10.18150/JQLIXZ, RepOD, V1

提供机构：

Institute of High Pressure Physics

创建时间：

2023-12-22