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Measurement spectrum obtained with the use of ZnO coated (100 nm) microsphere-based fiber-optic sensor - 300 Celsius degrees

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Application of a microsphere-based fiber-optic sensor with 100 nm zinc oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) method, for temperature measurements between 100°C and 300°C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD coated microsphere-based sensors can be successfully used for temperature measurements.

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