Dataset for Consolidation of Flame Hydrolysis Deposited silica with a 9.3 µm wavelength CO2 laser

Alphastep stylus profiler measurements and Zescope white light interferometer measurements of the surface profile of silica soot on the surface of a silicon wafer that had undergone consolidation through exposure to a 9.3 micron wavelength CO2 laser. The data show measurements for the laser operating at different duty cycles and spot translation speeds.