Dataset accompanying the publication: Coherent Fourier scatterometry using rotational scanning

Authors (publication): Sarika Soman, Bastiaan In't Velt, Roland Horsten, Silvania F. Pereira<br>This dataset contains raw and processed experimental data and the helper functions used to support the findings in the publication “Coherent Fourier scatterometry using rotational scanning”. The data was collected as part of a study on scan throughput improvement using a rotation stage for optical metrology applications. It includes coherent Fourier scatterometry (CFS) measurements of particle detection, calibration data for etched pits, scripts used for data processing and the FDTD simulations used to support the findings. The dataset is organised to ensure reproducibility and reuse, and can be applied to related research in nanoscale surface inspection.