Scanning Precession Electron Tomography (SPET) for Structural Analysis of Thin Films along Their Thickness

_______________________________________________________________________________<br> | General information: <br> |_______________________________________________________________________________<br> | Article | Scanning Precession Electron Tomography (SPET) for Structural Analysis <br> | | of Thin Films along Their Thickness <br> |<br> | Authors | Sara Passuti, Julien Varignon, Adrian David, Philippe Boullay <br> |<br> | Journal | Symmetry 2023, 15, 1459 <br> | <br> | DOI | 10.3390/sym15071459 <br> | <br> | Funding | NanED (www.naned.eu)(ESR project 12) <br> | <br> | Project Label | PVO_STO <br> | <br> | Sample Label | PVO_STO <br> | <br> | Dataset description | SPET (scanning precession electron tomography) acquisition on <br> | | the PVO thin film deposited on STO substrate, analyzed in section | | in the form of a TEM lamella. In the main folder the datasets | | corresponding to each one of the analyzed areas of the | | sample at different thicknesses (i.e. distances from the | | interface with the substrate) is found.<br> |______________________________________________________________________________<br> | Experimental <br> |_______________________________________________________________________________<br> | Data Type | Electron diffraction data - 3D ED <br> | <br> | Data collection method | SPET (Scanning Precession Electron Tomography) <br> | <br> | Number of experimental frames | 57 <br> | <br> | tilt range | -50.7° to +43.5° <br> | <br> | Exposure time per frame | 500 ms <br> | <br> | Software used for the data collection | ASI Accos <br> |______________________________________________________________________________<br> | Instrumental: |<br> |_______________________________________________________________________________|<br> | Instrument | Transmission electron microscope <br> | | Jeol F200 <br> | Radiation source | cold FEG <br> | <br> | Accelerating voltage | 200 kV <br> | <br> | Wavelength | 0.0251 Å <br> | <br> | Probe Type | Microdiffraction <br> | <br> | Beam Diameter | 10 nm <br> | <br> | Beam Convergence | Parallel beam, convergence &lt;0.1mrad <br> | <br> | Detector | Hybrid pixel detector ASI Cheetah M3 <br> | <br> | Number of pixels in the image | 512 x 512 <br> | <br> | Pixel size | 55 µm x 55 µm <br> | <br> | Effective camera length | 200 mm <br> | <br> | Calibration constant | 0.00708 Å-1/pixel <br> |______________________________________________________________________________<br> | Sample description: <br> |_______________________________________________________________________________<br> | Name | PVO thin film on STO substrate <br> | | at thickness = 0.52 nm <br> | | film deposited by SPS and cut by FIB <br> | <br> | Chemical composition | PrVO3, SrTiO3 <br> | <br> | Number of crystals contributing | 1 <br> | to the data set <br> |______________________________________________________________________________<br> | Authorship and bibliography <br> |_______________________________________________________________________________<br> | Author of the data | Sara Passuti (ESR 12) <br> | <br> | Related data <br> | <br> |______________________________________________________________________________<br> | Files and data formats <br> |_______________________________________________________________________________<br> | Image format | tiff_16bit <br> | <br> | Folders/files | layer_#1_0.52_nm <br> | | layer_#2_3.28_nm <br> | | layer_#3_4.20_nm <br> | | layer_#4_5.12_nm <br> | | layer_#5_7.88_nm <br> | | layer_#6_9.72_nm <br> | | layer_#7_12.48_nm <br> | | layer_#8_17.08_nm <br> | | layer_#9_29.08_nm <br> | | substrate <br> | | each of the folders contains the respective "tiff" folder containing <br> | | the diffraction patterns in tiff format and the files for the analysis,<br> | | as well as the metadata file with the specific information of the <br> | | dataset <br> ______________________________________________________________________________<br> Notes: <br> _______________________________________________________________________________