Dataset for Hybrid Approach to Reconstruct Nanoscale Grating Dimensions using Scattering and Fluorescence with Soft X-rays

This dataset accompanies the paper titled "Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays" available on arXiv. It includes measurement data, optimization results and fit data collected from a nanoscale grating with a soft X-ray fluorescence scatterometer, a model of the experiment and weighted, combined regression.本数据集配套发布于arXiv平台的题为《基于软X射线散射与荧光技术重构纳米光栅尺寸的混合方法》的论文。数据集包含通过软X射线荧光散射仪对纳米光栅采集得到的测量数据、优化结果与拟合数据，同时涵盖实验模型以及加权联合回归相关内容。