碳化硅高性能外延生长的数据集

本项目中的碳化硅高性能外延生长数据集涉及从数据来源、采集、加工到处理等多个环节的严格质量控制。
本数据集的数据来源于项目所研制的6英寸SiC外延片。在数据采集阶段，样片生长完成后，在超净间或洁净室中使用专业设备（如SEM和AFM）完成测试。测试前进行严格校准，确保仪器测试精度。对于部分性能测试，数据委托奥马检测中心进行采集，该中心不仅具备CNAS认证资质，还在电子产品质量监督检测领域具有行业领先水平。
数据在采集后立即进行完整性和准确性检查，存储于检测设备配置的高安全性存储器中，并生成详细的元数据以确保追溯性。
加工环节采用专业软件与通用数据处理工具（如Origin），以实现数据清理、标准化处理及统一格式。所有处理环节均有记录备案，确保可追溯性和一致性。
处理后的数据集适用于高质量6英寸SiC外延生长。这些数据可以帮助优化外延生长工艺参数，如温度、气氛成分和流量调控等，提高材料的均匀性和性能稳定性，为后续研究提供了强有力的数据支撑。
本数据集体量为202MB。

The high-performance silicon carbide (SiC) epitaxial growth dataset in this project involves strict quality control across multiple stages including data sourcing, collection, processing and post-processing.
The data of this dataset is sourced from 6-inch SiC epitaxial wafers developed by this project. During the data collection stage, after the wafers are grown, tests are conducted in cleanrooms using professional equipment such as SEM and AFM. Strict calibration is carried out before testing to guarantee the measurement accuracy of the instruments. For some performance tests, the data collection is entrusted to Aoma Testing Center, which is not only CNAS-accredited but also industry-leading in the field of electronic product quality supervision and testing.
Immediately after collection, the data undergoes integrity and accuracy checks, is stored in the high-security memory configured with the testing equipment, and detailed metadata is generated to ensure traceability.
The processing stage uses professional software and general-purpose data processing tools (such as Origin) to clean, standardize and unify the format of the data. All processing steps are documented and filed to ensure traceability and consistency.
The processed dataset is applicable to high-quality 6-inch SiC epitaxial growth. These data can help optimize the epitaxial growth process parameters, such as temperature, atmosphere composition and flow regulation, improve material uniformity and performance stability, and provide strong data support for subsequent research.
The total size of this dataset is 202 MB.