Influence of electron beam exposure dose on the properties of NbN superconducting nanowires

Figure 1 is a schematic diagram of the process flow made in the PPT, Data of Figure 2 is table data, Figure 3 is SEM image, Data of Figure 4 is resistance data measured using a comprehensive physical property measurement system (PPMS) and parameters analyzed based on these data, Figure 5 is EPS image of extremely low temperature Rs-T and I-V data measured using PPMS, and Data of Figure 6 is resistance data measured using PPMS.