PLC CWDM Wafer Fabrication Measurements
收藏Zenodo2025-07-23 更新2026-05-26 收录
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https://zenodo.org/doi/10.5281/zenodo.16117152
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资源简介：
This dataset contains fabrication measurements from 2,790 wafers used to create coarse wavelength-division multiplexing (CWDM) planar lightwave circuit (PLC) devices. Each record corresponds to a specific wafer, fabrication operation, and parameter, with measurements captured across five spatial wafer regions: left, top, center, bottom, and right.
The data includes operation metadata (e.g., layer, ID, name), parameter categories (e.g., ETCH_DEPTH, LAYER_THICKNESS), and temporal alignment using date_idx, min_date_idx, and max_date_idx.
It supports research in spatiotemporal modeling, yield analysis, and fabrication excursion detection.
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Zenodo创建时间：
2025-07-18
