硅光PDK数据集
收藏国家基础学科公共科学数据中心2026-01-30 收录
下载链接:
https://nbsdc.cn/general/dataDetail?id=67fb64c8195d265448044ac6&type=1
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资源简介:
硅光PDK数据集主要面向硅基光子集成研究,基于上海集成电路研发中心有限公司工艺线开发的PDK产生,主要记录了ICRD硅光PDK的版图、工艺信息及相关器件性能,具体包含如下14种C波段、O波段无源器件和8种C波段、O波段有源器件信息:Si波导、Si交叉结、Si转接器 、Si光栅耦合器、Si多模干涉仪、马赫曾德尔调制器、锗探测器、微环调制器、热光相移器。数据类型为器件版图及对应的工艺、测试参数文件。数据量为187MB
The Silicon Photonics PDK Dataset is primarily designed for silicon-based photonic integration research. It is generated using the PDK developed by the process line of Shanghai Integrated Circuit Research and Development Center Co., Ltd., and mainly records the layout, process information and associated device performance of the ICRD Silicon Photonics PDK. Specifically, it covers 14 types of passive devices operating in C-band and O-band, and 8 types of active devices operating in C-band and O-band, including Si waveguides, Si cross junctions, Si adapters, Si grating couplers, Si multimode interferometers, Mach-Zehnder modulators, germanium photodetectors, microring modulators, and thermo-optic phase shifters. The data types include device layout files, as well as corresponding process and test parameter files. The total data volume is 187 MB.
提供机构:
中国科学院微电子研究所搜集汇总
数据集介绍

背景与挑战
背景概述
该数据集聚焦于硅基光子集成领域,基于上海集成电路研发中心有限公司的工艺线开发,提供了涵盖14种无源器件和8种有源器件的版图、工艺及测试参数文件,总数据量约为187MB。
以上内容由遇见数据集搜集并总结生成




